Smart MEMS and sensor systems

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Smart Sensors and MEMS

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Bosch MEMS sensors: Working principle of an accelerometer

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Smart Mems And Sensor Systems - Elena Gaura, Robert Newman - Bok () | Bokus

Description Reviews More Details. Description In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector.

Bosch MEMS - With all the senses

Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective. The book explores the many different technologies needed to build such systems and integrates knowledge from three different domains: MEMS technology, sensor system electronics and pervasive computing science.

Throughout the book a top-down design perspective is taken, be it for the development of a single smart sensor or that of adaptive ad-hoc networks of millions of sensors. For experts in any of the domains named above the book provides the context for their MEMS based design work and an understanding of the role the other domains play.

For the generalist either in engineering or computing or the technology manager the underpinning knowledge is provided, which can inform specialist decision making. Sample Chapter s. Chapter 1: Markets and Applications 1, KB.


Readership: Graduate students on courses in sensing, instrumentation, VLSI, and MEMS technology; researchers and academics dealing with smart sensor systems; practitioners who need to understand and apply the technology effectively. Chapter 2 Microfabrication Technologies.

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Chapter 3 Sensor Electronics.